Towards in-line real-time characterization of roll-to-roll produced ZTO/Ag/ITO thin films by hyperspectral imaging
2023 | journal article. A publication with affiliation to the University of Göttingen.
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Towards in-line real-time characterization of roll-to-roll produced ZTO/Ag/ITO thin films by hyperspectral imaging
Dogan-Surmeier, S.; Gruber, F.; Bieder, S.; Schlenz, P.; Paulus, M.; Albers, C. & Schneider, E. et al. (2023)
Journal of Physics. D, Applied Physics, 56(36) art. 365102. DOI: https://doi.org/10.1088/1361-6463/acd8c9
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Details
- Authors
- Dogan-Surmeier, Susanne; Gruber, Florian; Bieder, Steffen; Schlenz, Patrick; Paulus, Michael; Albers, Christian; Schneider, Eric; Thiering, Nicola; Maurer, Christian; Tolan, Metin; Sternemann, Christian
- Abstract
- Abstract Large area manufacturing processes of thin films such as large-area vacuum roll-to-roll coating of dielectric and gas permeation barrier layers in industry require a precise control of e.g. film thickness, homogeneity, chemical compositions, crystallinity and surface roughness. In order to determine these properties in real time, hyperspectral imaging is a novel, cost-efficient, and fast tool as in-line technology for large-area quality control. We demonstrate the application of hyperspectral imaging to characterize the thickness of thin films of the multilayer system ZTO/Ag/ITO produced by roll-to-roll magnetron sputtering on 220 mm wide polyethylene terephthalate substrate. X-ray reflectivity measurements are used to determine the thickness gradients of roll-to-roll produced foils with sub nanometer accuracy that serve as ground truth data to train a machine learning model for the interpretation of the hyperspectral imaging spectra. Based on the model, the sub-layer thicknesses on the complete substrate foil area were predicted which demonstrates the capabilities of this approach for large-scale in-line real-time quality control for industrial applications.
- Issue Date
- 2023
- Journal
- Journal of Physics. D, Applied Physics
- ISSN
- 0022-3727
- eISSN
- 1361-6463
- Sponsor
- NanoQI European Union Horizon 2020