Hard real time control software for use in electron beam lithography with an emphasis on patterns with radial symmetry
2003 | conference paper. A publication with affiliation to the University of Göttingen.
Jump to: Cite & Linked | Documents & Media | Details | Version history
Cite this publication
Hard real time control software for use in electron beam lithography with an emphasis on patterns with radial symmetry
Heim, S.; Rudolph, S.; Rudolph, D. & Schmahl, G. (2003)
Journal de Physique. IV, Proceedings, 104 pp. 197-201. 7th International Conference on X-Ray Microscopy, GRENOBLE, FRANCE. DOI: https://doi.org/10.1051/jp4:200300060
Documents & Media
Details
- Authors
- Heim, S.; Rudolph, S.; Rudolph, D.; Schmahl, G.
- Abstract
- In order to overcome the limitations with existing electron beam lithography control systems a complete beam control software system has been implemented from scratch, therefore allowing for optimizations especially for patterns with radial symmetry during each stage of the deployment process.
- Issue Date
- 2003
- Status
- published
- Journal
- Journal de Physique. IV, Proceedings
- Conference
- 7th International Conference on X-Ray Microscopy
- Conference Place
- GRENOBLE, FRANCE
- ISSN
- 1155-4339
