Sub-5 nm hard x-ray point focusing by a combined Kirkpatrick-Baez mirror and multilayer zone plate
2013-08-12 | journal article; research paper. A publication with affiliation to the University of Göttingen.
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Sub-5 nm hard x-ray point focusing by a combined Kirkpatrick-Baez mirror and multilayer zone plate
Döring, F. ; Robisch, A.-L. ; Eberl, C. ; Osterhoff, M. ; Ruhlandt, A. ; Liese, T. & Schlenkrich, F. et al. (2013)
Optics Express, 21(16) pp. 19311-19323. DOI: https://doi.org/10.1364/OE.21.019311
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Details
- Authors
- Döring, Florian ; Robisch, Anna-Lena ; Eberl, Christian ; Osterhoff, Markus ; Ruhlandt, Aike ; Liese, Tobias ; Schlenkrich, Felix ; Hoffmann, S.; Bartels, Matthias ; Salditt, Tim ; Krebs, Hans-Ulrich
- Abstract
- Compound optics such as lens systems can overcome the limitations concerning resolution, efficiency, or aberrations which fabrication constraints would impose on any single optical element. In this work we demonstrate unprecedented sub-5 nm point focusing of hard x-rays, based on the combination of a high gain Kirkpatrick-Baez (KB) mirror system and a high resolution W/Si multilayer zone plate (MZP) for ultra-short focal length f. The pre-focusing allows limiting the MZP radius to below 2 mu m, compatible with the required 5 nm structure width and essentially unlimited aspect ratios, provided by enabling fabrication technology based on pulsed laser deposition (PLD) and focused ion beam (FIB). (c) 2013 Optical Society of America
- Issue Date
- 12-August-2013
- Journal
- Optics Express
- Project
- SFB 755: Nanoscale Photonic Imaging
- Organization
- Institut für Materialphysik ; Institut für Röntgenphysik
- Working Group
- RG Salditt (Structure of Biomolecular Assemblies and X-Ray Physics)
- ISSN
- 1094-4087
- eISSN
- 1094-4087
- Language
- English
- Subject(s)
- x-ray optics; SFB 755
