Ion beam modification of the Ni-Si solid-phase reaction: The influence of substrate damage and nitrogen impurities introduced by ion implantation
2020 | journal article. A publication with affiliation to the University of Göttingen.
Jump to: Cite & Linked | Documents & Media | Details | Version history
Cite this publication
Ion beam modification of the Ni-Si solid-phase reaction: The influence of substrate damage and nitrogen impurities introduced by ion implantation
van Stiphout, K.; Geenen, F A; Santos, N M; Miranda, S M C; Joly, V.; Demeulemeester, J. & Mocuta, C. et al. (2020)
Journal of Physics D: Applied Physics, 54(1) pp. 015307. DOI: https://doi.org/10.1088/1361-6463/abb046
