Sub-10 nm beam confinement by X-ray waveguides: design, fabrication and characterization of optical properties
2012-03-01 | journal article; research paper. A publication with affiliation to the University of Göttingen.
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Sub-10 nm beam confinement by X-ray waveguides: design, fabrication and characterization of optical properties
Krueger, S. P. ; Neubauer, H.; Bartels, M. ; Kalbfleisch, S.; Giewekemeyer, K. ; Wilbrandt, P. J. & Sprung, M. et al. (2012)
Journal of Synchrotron Radiation, 19 pp. 227-236. DOI: https://doi.org/10.1107/S0909049511051983
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- Authors
- Krueger, S. P. ; Neubauer, Heike; Bartels, Matthias ; Kalbfleisch, Sebastian; Giewekemeyer, Klaus ; Wilbrandt, P. J.; Sprung, Michael; Salditt, Tim
- Abstract
- The propagation of hard X-ray synchrotron beams in waveguides with guiding layer diameters in the 9-35 nm thickness range has been studied. The planar waveguide structures consist of an optimized two-component cladding. The presented fabrication method is suitable for short and leak-proof waveguide slices with lengths (along the optical axis) in the sub-500 mu m range, adapted for optimized transmission at photon energies of 11.5-18 keV. A detailed comparison between finite-difference simulations of waveguide optics and the experimental results is presented, concerning transmission, divergence of the waveguide exit beam, as well as the angular acceptance. In a second step, two crossed waveguides have been used to create a quasi-point source for propagation-based X-ray imaging at the new nano-focus endstation of the P10 coherence beamline at Petra III. By inverting the measured Fraunhofer diffraction pattern by an iterative error-reduction algorithm, a two-dimensional focus of 10 nm x 10 nm is obtained. Finally, holographic imaging of a lithographic test structure based on this optical system is demonstrated.
- Issue Date
- 1-March-2012
- Journal
- Journal of Synchrotron Radiation
- Organization
- Institut für Röntgenphysik
- Working Group
- RG Salditt (Structure of Biomolecular Assemblies and X-Ray Physics)
- ISSN
- 0909-0495
- Language
- English
- Subject(s)
- x-ray optics